Technology

For over a decade Microsaic Systems has successfully developed innovative mass spectrometry (MS) products, based on Micro-Electrical-Mechanical Systems (MEMS) originating at the highly regarded Optical and Semiconductor Devices Group at Imperial College London.  

Microsaic has subsequently established a large portfolio of 88 patents, of which 36 are granted, and four registered trademarks.

MEMS

MEMS technology involves the use of specialist semiconductor processes to build tiny structures on silicon wafers. Precision features are fabricated by selectively etching away silicon, or adding new layers. Entire batches of devices can be produced on a wafer, reducing manufacturing costs.

Mass Spectrometry on a chip

Although fast and sensitive, typical MS products are large, heavy, energy intensive and expensive to acquire and operate. The performance of a mass spectrometer depends on its mechanical precision. The more perfectly aligned the components are, the better the system’s sensitivity and selectivity.

Microsaic has successfully applied the precision of MEMS technology to achieve the performance of a ‘mainframe’ MS system on a chip. In addition, due to physical scaling laws associated with the miniaturisation of MS components, the vacuum and power requirements for systems based on the technology are not as great as for larger, conventional MS systems. Consequently, Microsaic’s MS products are substantially smaller, lighter, consume less energy and have lower running costs.

Microsaic has successfully integrated the key MS components onto patented chip-based technologies called spraychip®, vac-chip and ionchip®. The components may be replaced by users, avoiding the expense and delay of requiring a skilled technician to maintain the system, as is generally the case with today’s MS products.

The core components of the 3500 MiD are as follows:

Spraychip®

The spraychip® is a microspray ion source operating at atmospheric pressure that incorporates features to accurately align a standard capillary emitter tip relative to an integrated counter electrode, and a means of supplying a coaxial flow of nebulising gas. The complete assembly is essentially an ion gun that may be positioned relatively freely with respect to the vacuum interface.

vac-chip

The vac-chip is a miniature vacuum interface that transfers a flux of ions from the spraychip to the ionchip® housed inside a vacuum chamber. The device has been designed to be easily replaceable, cleanable and cost-effective.

ionchip®

The ionchip® is an advanced microengineered quadrupole filter based on a silicon-on-glass substrate. The structural support and electrical isolation offered by the glass layer allows a quadruple arrangement of rods. Because ionchip is microfabricated on wafers, very high precision and accuracy can be achieved. Excellent tolerances and micro-alignment have unleashed best-in-class levels of performance. Patented ion optical features are also integrated to improve further boost transmission and resolution - complex integrated optics to couple ions into and out of the structure are not needed. Wafer fabrication is a batch manufacturing process, which means ionchip technology may be reproduced in very high volumes without compromising analyzer quality, reliability or performance.

Ionchip advantages:

• Compact mass spectrometer system

• Low manufacturing cost - batch fabrication on silicon wafer

• Identification of compounds is based on an industry standard

• ‘fingerprint’ library

• Excellent dynamic range

• High mass range

• Superior resolution