Microsaic’s solutions are based
on Micro Electrical Mechanical Systems (MEMS) developed
by the Optical
and Semiconductor Devices Group at Imperial.
MEMS technology involves the use of specialist
semiconductor processes to build tiny structures on silicon
wafers. Precision features are fabricated by selectively
etching away silicon, or adding new layers. Entire batches
of devices can be produced on a wafer, reducing manufacturing
costs.
The performance of a mass spectrometer
depends on its mechanical precision. The more perfectly
aligned the components are, the better the system’s
sensitivity and selectivity. Microsaic has sucessfully applied
the precision of MEMS technology to achieve the performance
of a ‘mainframe’ system on a chip.
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